精确测量极小的电容值: 简单的偏移消除技术,用于小电容测量使用镊表

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Application Note MPA-CB1 Rev. A

 

精确测量极= 小的电容值

简单的偏移&= #28040;除技术,用于小电= 481;测量使用镊表

= 原文来自NASA’s Tech Briefs

July 2020

 


测= 量电容有三种主要方= 7861;可供选择:交流响ò= 12;法、直流充放电法和= 电桥法。交流响应法= 1644;电桥法适用于LCR测量,Ň= 80;直流充放电法只适用= 于RC测量。

LCR-Read= er-MPA采用交ė= 69;响应法和直流充放电= 法进行测量。对于电= 3481;范围在1 mF1 F使用直ė= 69;充放电方法更有效,= 而在0.1 pF1 mF另一种Ą= 41;法可显示0.1%的基本Ŀ= 34;度。

充= 放电方法使用已知的= 0005;流对电容器充放电ᦁ= 2;同时测量产生的电压&= #30340;上升速率。电容值= 197;上升速率为基础,上= ;升速率越慢,电容越&#= 22823;。

交= 流响应方法通过设备= 0256;递已知的高频电流Ӎ= 0;从比率中记录产生的&= #30005;压并计算阻抗的大= 567;量。电压和电流之间= ;的相位角,等效电容&#= 25110;电感可同时测量,ñ= 82;计算出电阻。

更= 复杂的测试设备使用= 0854;他方法,如电桥电ั= 5;。该方法测量精度高&= #65292;间接测量阻抗。电= 725;法还可以测量寄生电= ;阻、电容和电感。这&#= 31181;方法是通过将元件ă= 18;入电桥电路来实现的= 。另一条腿的值是变= 1270;的,通过这个来确ऩ= 0;未知的阻抗值。

测= 量微小电容的方法综= 6848;发表在《测量微小ஸ= 5;容变化的高精度方法&= #12299;,Ashkan Ashrafi<= span style=3D'mso-bookmark:_Hlk37068358'>Hossein = Golnabi,《科é= 98;仪器评论》,第70卷第8期,19998月。

    
LCR-Reader-MPA

1LCR仪表方Ċ= 94;图。电压源的电压通= 过一个限制100Ω电阻应ī= 92;到DUT连接点ab . V测试信Ö= 95;的振幅和频率可调。= 也可以对被测工件施= 1152;正的或负的直流电࡚= 7;。被测元件上的电压&= #38477;由DAu测量,Ĭ= 05;阻Rj上的电Õ= 87;降由DAj测量,Ç= 82;流经被测元件的电流= 成正比。对ADC信号进Ŝ= 92;数字化后,根据公式= DUT阻抗Z =3DRj<= /span>* Vau/Vaj计算其ƀ= 59;抗。

用= 开短路探针校准时获= 4471;的阻抗(偏移量)的初始Í= 40;存储在设备的存储器= 中,并在计算被测部= 0214;的阻抗时考虑,从೎= 0;消除了由于设备内部&= #23492;生效应引起的偏移%= 327;。

被测元Ê= 14;可表示为以下等效电= 路之一:

(1) and (2): 交流测ŵ= 27;串联电路 (3) and (4): <= span style=3D'mso-bookmark:_Hlk37068358'>交流并ň= 52;电路, (5,6,7) 二极管z= 89;电阻、电容的直流测= 量。

串联电ū= 35;阻抗Z =3D Rs + iXs 并= 联电路阻抗 Z =3D 1/(1/Rp + 1/iXp) 其中 Xs (Xp) < 0 如= 果电抗是电容性的,= 2312;Xs (Xp) > 0 电= 抗是有感的。

 

 

 

=

电= 容 C =3D 1/(2πf|Xs|) 其= 中 f 为测试Ɔ= 57;率。


电= 感 L =3D Xs/(2πf). Q =3D |= Xs|/Rs. D =3D 1/Q.         
 |Z| =3D
<= /p>

LCR-Reader-MPA设置为自动模= ;式时,它将选择最佳&#= 39057;率和等效电路进行ė= 79;量。也可手动设定设= 备的具体测试参数;= 包= 括测量模式,测试Ì= 49;号的频率范围为100 Hz100 kHz,并选ý= 21;1.00.50.1 Vrms= 的测试Ĭ= 05;压。

MPA使= 用通过被测元件的直= 7969;电流,允许测量电૬= 9;和电压。使用定= 律,= 计= 算直流电阻(RDC)

电容是根据被= ;测电容器在一定时间&#= 38388;隔充电时的电压变Ô= 70;和测量大于40mf的元件ą= 02;施加的电流来计算的=

为了确定<= span style=3D'mso-bookmark:_Hlk37068358'>p-n结的极ö= 15;,可以通过施加直流= 电压n向前和Ň= 63;转方向,检测二极管= 来确定。

该装置通过比= ;较输入信号和参考电&#= 21387;来测量电压。

频率计在一定= ;时间内(即输入Ì= 49;号的两个斜坡之间<= /span>)计算参Ň= 71;发生器的脉冲。:默认为1)。同时ť= 45;算输入信号的周期数= 。然后由公式f =3D M/N*f计算频ħ= 75;fN为参考Ö= 57;生器的脉冲数,f为参考Ö= 57;生器的频率,M为输入Ì= 49;号的周期数

抵消消除技&= #26415;

测= 试引线的寄生偏移量= 1462;决于它们之间的距బ= 3;。电容偏置校准板是&= #19968;种可靠的方法,可= 197;准确地确定距离,从= ;而确定寄生电阻。虚&#= 25311;PCB使用孔Ĉ= 69;表示不同尺寸的元件= (2)。= 该板可É= 97;用来确定任何使用交= 流响应方法的镊表(Smart Tweezers, LCR-Reader <= /span>和其它ž= 18;表)的寄生Ĭ= 05;容

 

3DImage

Figure 2

 

使用板,简单= ;地把测试引线放入相&#= 21516;尺寸的孔作为被测ť= 97;组件的尺寸。

. 用= MPA进行开放校Ñ= 34;,按住Ă= 05;纵杆向右,发出哔哔= 声2声,然×= 18;松开。该装置将自动= 消除测量值中的寄生= 0005;容。下表显示了导ಬ= 7;之间镊子的距离与寄&= #29983;电容值的关系。所= 034;的测量是在100千赫时Ű= 27;行的。开放式校准使= 用2920大小的ń= 52;件(尖端之ſ= 88;7.4毫= 米)= ,= 因此该ń= 52;件的偏移量接近于零= 。注意,结果将略有= 9981;同,取决于因素,ࣳ= 4;周围的环境镊子和尖&= #31471;之间的距离;即使使ī= 92;固定的尺寸,施加在= 尖端的压力可能会改= 1464;距离。

用组件的具体= ;尺寸对设备进行适当&#= 30340;开式校准后,组件Í= 40;的绝对精度约为3 fF.

 

Size

Length

C (pF)

01005=

0.4

0.249

0201<= o:p>

0.6

0.225

0402<= o:p>

1

0.177

0603<= o:p>

1.5

0.138

0805<= o:p>

2

0.115

1008<= o:p>

2.5

0.098

1206<= o:p>

3

0.077

1806<= o:p>

4.5

0.042

2010<= o:p>

5

0.031

2512<= o:p>

6.3

0.014

2920<= o:p>

7.4

0

 

 

 

 

 

附录 A.

LCR-READER-MPA 基本功能和&= #29305;点

特性总结

<= span style=3D'mso-list:Ignore'>•&nb= sp;      L-C-R-ESR LED/二极管测量

      = 交流/İ= 52;流电压/Ĭ= 05;流测量

      = 频率、脉&= #20914;周期、占空比表

<= span style=3D'mso-list:Ignore'>•&nb= sp;      示波器、= 信号发生器

<= span style=3D'mso-list:Ignore'>•&nb= sp;      NIST 可追溯校= 准证书 <= /span>

<= span style=3D'mso-list:Ignore'>•&nb= sp;      /短路校准<= span style=3D'mso-bookmark:_Hlk37068358'> <= /span>

<= span style=3D'mso-list:Ignore'>•&nb= sp;      元器件分类 <= /span>

<= span style=3D'mso-list:Ignore'>•&nb= sp;      超级电容器૭= 9;试

<= span style=3D'mso-list:Ignore'>•&nb= sp;      可选蓝牙= 模块

 


技术参数

基Ĉ= 12;精度: 0.1%
测试'= 057;率: 100 Hz - 100 kHz
测试= 449;号电平: 0.1, 0.5, 1.0 Vrms=

测量范围

<= span style=3D'mso-bookmark:_Hlk37068358'>电阻 R: 5 m= = W to 20 MW
电容 C: 0.1 pF to = 1 F
电感 L: 1 nH to 100 H

物流参数

<= span style=3D'mso-bookmark:_Hlk37068358'>尺寸: 18 x 3 x 1= .6 cm
重量: 1.35 oz. <= br> 电池: 3.7V LiPo<= o:p>

 

 

 


附录B.

LCR-READER-MPA R-L-C-D 模式
屏幕截图

R-L-C-D模= 式是默认的器件模式= 5292;用于测量电阻、电ब= 1;、电感和二极管。要&= #36873;择模式,请在主菜= 333;中选择R-L-C-D。= 为了访问模式参数(隐= 藏的子菜单),= 将操纵杆向右按一声= 2290;R-L-C-D模式的典型屏幕= 2914;下::

<= o:p> 

 

 

 

 

 

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